Nanofabrication using focused ion and electron beams principles and applications /

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Bibliographic Details
Corporate Author: ProQuest (Firm)
Other Authors: Utke, Ivo, Moshkalev, Stanislav, Russell, Phillip, 1955-
Format: Electronic eBook
Language:English
Published: Oxford ; New York : Oxford University Press, 2011.
Series:Nanomanufacturing series ; v. 1
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Online Access:Click to View
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